Surface contamination, cleaning technologies and evaluation in precision cleaning fields.
نویسندگان
چکیده
منابع مشابه
Cleaning and surface properties
Principles of precision cleaning for ultra high vacuum applications are reviewed together with the techniques for the evaluation of surface cleanliness. Methods to verify the effectiveness of cleaning procedures are discussed. Examples are presented to illustrate the influence of packaging and storage on the recontamination of the surface after cleaning. Finally, the effect of contamination on ...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 1988
ISSN: 1882-675X,0912-0289
DOI: 10.2493/jjspe.54.1835